Used
Used
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| Brand | Aera, Novellus |
|---|---|
| Manufacturer | Hitachi Metals Ltd. |
| LAM Research P/N | 22-374019-00, 22-380821-00, 22-374018-00, 22-374017-00 |
| MPN | FCPI981C4VX9TAA, FCPI980C4VX9TAA |